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PANEL ON NANOSCALE SCIENCE AND TECHNOLOGY

Co-Chairs

JULIA M. PHILLIPS is Deputy Chief Technology Officer and Director of Science, Technology and Engineering Innovations and Partnerships at Sandia National Laboratories. Previous positions at Sandia include Director, Nuclear Weapons Science and Technology Programs Director, Physical, Chemical, and Nano Sciences Center at Sandia National Laboratories, and Director of the DOE Center for Integrated Nanotechnologies (CINT) at Sandia and Los Alamos National Laboratories. She is a member of the National Academy of Engineering. After 14 years at AT&T Bell Laboratories, she came to Sandia in 1995. Her research has been in the areas of epitaxial metallic and insulating films on semiconductors, high-temperature superconducting, ferroelectric, and magnetic oxide thin films, and novel transparent conducing materials. Dr. Phillips serves on the Council of the National Academy of Engineering, is past chair of the APS Division of Condensed Matter Physics and served as president of the Materials Research Society. She received the 2008 George E. Pake Prize for outstanding achievements in physics research combined with major success as a manager of research or development. Dr. Phillips is a Fellow of the Materials Research Society, American Academy of Arts and Sciences, American Association for the Advancement of Science, and the American Physical Society,. She has served on the editorial boards of "Applied Physics Letters," "Journal of Applied Physics," and "Applied Physics Reviews." She currently chairs the Advisory Review Board for "Journal of Materials Research" and has served as its principal editor. She has edited two books, written three book chapters, and prepared more than 100 journal publications, twelve major review articles, and 45 refereed conference proceedings publications. She also holds five patents. Dr. Phillips holds a Ph.D. in applied physics from Yale University and a B.S. in physics from the College of William and Mary.

HAROLD G. CRAIGHEAD is Charles W. Lake, Jr. Professor of Engineering, Professor of Applied and Engineering Physics at Cornell University. He is a member of the National Academy of Engineering. He has been a pioneer in nanofabrication methods and the application of engineered nanosystems for research and device applications. Dr. Craighead's recent research activity includes the use of nanofabricated devices for biological applications. His research continues to involve the study and development of new methods for nanostructure formation, integrated fluidic/optical devices, nanoelectromechanical systems and single molecule analysis. From 1979 until 1984, he was a Member of Technical Staff in the Device Physics Research Department at Bell Laboratories. In 1984 he joined Bellcore where he formed and managed the Quantum Structures research group. Dr. Craighead joined the faculty of Cornell University as a Professor in the School of Applied and Engineering Physics in 1989. From 1989 until 1995, he was Director of the National Nanofabrication Facility at Cornell University. He was Director of the School of Applied and Engineering Physics from 1998 to 2000 and the founding Director of the Nanobiotechnology Center from 2000 to 2001. He served as Interim Dean of the College of Engineering from 2001 to 2002, after which he returned to the Nanobiotechnology Center as Director until 2010. He has more than 360 publications to his credit. Dr. Craighead received his Bachelor of Science Degree in physics, with high honors, from the University of Maryland, College Park and his Ph.D. in physics from Cornell University.

Members

ILESANMI ADESIDA is Dean of the College of Engineering and Donald Biggar Willett Professor of Engineering in the Department of Electrical and Computer Engineering at the University of Illinois at Urbana-Champaign. He was elected to membership in the National Academy of Engineering “for contributions to the nanometer-scale processing of semiconductor structures and applications in high-performance electronic and optoelectronic devices.” He has received worldwide recognition for his extensive research and innovative techniques developed in the applications of advanced semiconductor processing and in the manufacturing of high-speed microelectronic devices and circuits. His research interests include nanofabrication, electronic and transport properties of ultra-low dimensional semiconductor structures, high-speed optoelectronic devices and integrated circuits, and radiation effects. He is a Fellow of the Institute of Electrical and Electronics Engineers, the American Association for the Advancement of Science, the American Vacuum Society, and the Optical Society of America. He is a member of the Minerals, Metals and Materials Society, the Materials Research Society, and the Society for Engineering Education. Dr. Adesida earned his B.S., M.S., and Ph.D., all in electrical engineering, from the University of California at Berkeley. After finishing his doctorate, he worked briefly at Cornell University and then as a university administrator in Nigeria, his native country. He joined the Illinois faculty in 1987, and became a U.S. citizen in 2002.

STEPHEN Y. CHOU is Joseph C. Elgin Professor of Engineering and the head of the NanoStructure Laboratory at Princeton University. Dr. Chou is a member of the National Academy of Engineering. His pioneering research and inventions have shaped new paths in the fields of nanofabrication, nanoscale electronics, optoelectronics, magnetics, biotechnology, and materials, and have brought significant impacts to both academia and industry. As an entrepreneur, he founded Nanonex and NanoOpto. Among other awards and honors, Dr. Chou is an IEEE Fellow, a Packard Fellow, and an Inductee of New Jersey High Technology Hall of Fame, and he has received the IEEE Brunetti Award, the Pioneer Award of Nanoimprint and Nanoprint Technology, and the DARPA ULTRA Program Significant Technical Achievement Award. Dr. Chou’s graduate work used X-ray lithography to scale MOSFETs to the 60 nm range. Since 1985 he has demonstrated various ultra-small MOSFETs, quantum devices, and single electron transistors. In the early 1990s, he began pioneering work in exploring sub-wavelength optical elements (SOEs) and in bringing nanofabrication into magnetic data storage media. He originated quantized magnetic disks, a new paradigm in magnetic data storage, and he pioneered nanoimprint lithography (NIL), a revolutionary nanoscale patterning method that allows sub-10 nm patterning over large areas with high throughput and low cost. He is also a key inventor of lithographically-induced self-assembly (LISA) and laser-assisted direct imprint (LADI) and applications of NIL, LISA, and LADI in a wide range of fields, from electronics and optics to magnetics, biotechnology, and materials. Since 1999, he has been applying unique and extensive expertise in nanofabrication, nanoelectronics, nanooptics, nanomagnetics, and nanomaterials to biology for developing innovative biological manipulators, separators, detectors, and analyzers for DNAs, proteins, and cells. He has published more than 280 papers and holds 15 patents and more than 40 patent applications. Dr. Chou received his M.A. in physics from the State University of New York at Stony Brook and his Ph.D. in physics from the Massachusetts Institute of Technology.

ROBERT E. FONTANA, JR., began a work assignment in June 2008 with IBM in the area of advanced tape transducers and in NAND flash extendibility. He is a member of the National Academy of Engineering. From 2003 to 2007, he was employed by Hitachi GST (this company was created with IBM’s sale of their hard disk drive business to Hitachi in 2002.) His last work assignment with Hitachi GST was the design, construction supervision, and start-up of the 15000-square-foot processing facility for Hitachi GST for research activities in nano-structured magnetic transducers and non-structured thin-film heads. This facility incorporated nano-processing based tooling: Leica VB6 e-beam writer for nano-dimension lithography (down to ~ 20 nm), optical I line lithography, CMP, RIE, ion milling, ion beam deposition and this facility was configured to accommodate circular substrate sizes from 24 mm diameter up to 150 mm diameter and small piece parts down to 10 mm on a side. From 1981 to 2002, he worked with IBM. Here, in the early 1980s he developed processes for the world’s first working magnetoresistive film heads in the IBM Research Division and transferred these processes to manufacturing facilities in the IBM Storage Division. In the late 1980s, he designed, built, and managed a clean room for IBM Research and IBM Storage Division, which evolved over time to include, in 2000, Leica VB6 e-beam tooling. Dr. Fontana received his B.S., M.S., and Ph.D. in electrical engineering from the Massachusetts Institute of Technology.

DANIEL J. HERR is Director of Semiconductor Research Corporation’s Nanomanufacturing Science Research. He contributed to the collective effort that resulted in SRC being awarded the 2005 National Medal of Technology. He leads an international team that provides vision, guidance, and leveraged support for a number of the top collaborative interdisciplinary university research programs on emerging nanoelectronics related materials and assembly methods, environmentally benign high-performance manufacturing, and enabling nano-characterization technology options. He also is exploring emerging research opportunities in bioelectronics, ultra-low power systems, and energy harvesting. He held senior engineering positions at Honeywell Corporation, during the VHSIC program, and Shipley Company, in Japan, where he helped an R&D facility on-line. He also founded Avatar R&D Corporation, a materials design consulting firm. Dr. Herr also serves as Adjunct Associate Professor in the Department of Materials Science and Engineering at North Carolina State University, where he co-developed and co-teaches an interdisciplinary graduate level course on The Materials Science of Nanoelectronics. His technical accomplishments include a suite of product optimization software, more robust than Taguchi’s methodology, and foundational patents/disclosures, in areas such as: defect tolerant patterning, controlled nanotube synthesis and placement, deterministic semiconductor doping, and ultimate CMOS devices. More recently, he was elected a Fellow of the International Society for Optical Engineering for specific achievements in the design, development, and commercialization of two early families of chemically amplified resists and addressing critical patterning and control challenges in the deep nano-domain. His publications cover topics from mechanistic chemistry to strategic industry trends in nanoelectronics. He has given over 90 invited presentations and seminars, nationally and internationally.

KANTI JAIN is Professor of Electrical and Computer Engineering at the University of Illinois at Urbana-Champaign. He was elected to membership in the National Academy of Engineering "for contributions to the development of high-resolution, deep-ultraviolet excimer lithography for microelectronic fabrication.” Dr. Jain joined the University of Illinois faculty in 2006, prior to which he held senior technical and managerial positions in the microelectronics industry for 30 years, including at IBM (1979-88), Hewlett-Packard (1975-77), and Raychem (1989-91). In the 1980s, he invented and developed the technology of excimer laser lithography for which he received two Outstanding Innovation Awards from IBM and which is now the dominant technology used in the production of semiconductor IC chips worldwide. He is also founder and president of Anvik Corporation, a microelectronics systems company, where in the 1990’s, he developed the technologies for large-area lithography that are widely used today in the production of flat-panel displays and televisions. He holds 69 patents (55 issued, 14 pending), has published 66 papers, and is the author of the book Excimer Laser Lithography (SPIE, 1990). Professor Jain is a recipient of the David Richardson Medal of the Optical Society of America, a Fellow of the Institute of Electrical & Electronics Engineers, a Fellow of the Optical Society of America, a Fellow of SPIE-The International Society for Optical Engineering, and a former member of the Board of Directors and the Executive Committee of SPIE. He received his Ph.D. in electrical engineering and solid state physics from the University of Illinois at Urbana-Champaign, his M.S. from the same institution, and his B.Tech. (Hons.) from the Indian Institute of Technology, Kharagpur. He was a Postdoctoral Fellow at the Massachusetts Institute of Technology (MIT) from 1975 to 1977.

MAX LAGALLY is Erwin W. Mueller Professor and Bascom Professor of Surface Science in the Department of Materials Science and Engineering at the University of Wisconsin-Madison. He was elected to membership in the National Academy of Engineering "for contributions to surface science, in particular in semiconductor film growth and in the development of novel analytical techniques." His fields of interest include: nanoscale properties of surfaces, interfaces, thin films, and dimensionally-confined structures; atom-scale mechanisms of film growth (Group IV semiconductors, nano-strain engineering, silicon nanomembranes); relationship of nanostructure to localized electronic and optoelectronic properties, quantum dots; development of advanced instrumentation for growth and surface and interface studies, in particular diffraction, imaging, and scanned-probe microscopies; and bioarrays and biomolecular surface modification. Dr. Lagally received his B.S. in physics from the Pennsylvania State University and his M.S. and Ph.D. in physics from the University of Wisconsin-Madison.

AMANDA PETFORD-LONG is Director, Center for Nanoscale Materials at Argonne National Laboratory and Professor, Department of Materials Science and Engineering, Northwestern University. Her research interests include the correlation of magnetic, transport, and optical properties of layered ferroic thin films with microstructure, magnetic domain structure and composition profile, determined using a range of high-resolution electron-microscopy and position-sensitive atom probe techniques, including Lorentz microscopy for imaging magnetic domains. Her research interests also include the development of in-situ TEM techniques for the investigation of magnetization reversal, transport behavior ,and in-situ crystallization. Her honors and awards include: being a visiting professor at Hong Kong Chinese University (2001); being awarded the Wohlfarth Lecture Prize (2003); being elected Fellow of the Royal Academy of Engineering (2005); being elected Fellow of the American Physical Society (2008); and being elected Argonne Distinguished Fellow (2010). Dr. Petford-Long regularly acts as a session chair and program committee member for international magnetism conferences (MMM and Intermag) and as a proceedings editor for Intermag (2003 and 2006). She is a member of IEEE Trans Mag Publications Committee and an Advisory Editor for “Journal of Magnetism and Magnetic Materials.” She received her B. Sc. Physics (Hons.) Class 2i from University College London and her D. Phil. from the University of Oxford (“Structural studies of various -aluminas”).

HENRY I. SMITH
is Professor of Electrical Engineering at MIT. He is a member of the National Academy of Engineering. From 1990 to 2005 he held the Joseph F. and Nancy P. Keithley Chair in Electrical Engineering. He relinquished his tenured chair in 2005, but continues to teach and supervise graduate-student research at MIT. His research interests include nanofabrication, electronic and photonic devices, and a wide range of applications of nanostructures. Prof. Smith and his coworkers are responsible for a number of innovations in nanoscale science and engineering, including: comformable-photomask lithography, x-ray lithography, the phase-shift mask, the attenuating phase shifter, spatial-phase-locked e-beam lithography, achromatic-interference lithography, spatial-frequency doubling, coherent-diffraction lithography, immersion photolithography, zone-plate-array lithography, absorbance-modulation optical lithography, interferometric alignment, graphoepitaxy, subboundary entrainment, templated self-assembly, nanomembrane assembly, and a variety of quantum-effect, short-channel, single-electron, nanomagnetic, photonic-crystal and microphotonic devices. Prof. Smith serves on the International Advisory Board of the MacDiarmid Institute of New Zealand; the Advisory Committee of the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication; the International Program Committee of the Micro and Nanoengineering Conference, and the Scientific Advisory Board of Nantero, Inc., NanoNex and NM2. He is the founder and President of an MIT spin-off company, Lumarray, Inc. He holds more than 40 U.S. patents and has published more than 400 technical articles. Prof. Smith is a Fellow of the American Academy of Arts and Sciences, the IEEE, and the Optical Society of America, and is a member of the APS, AVS, MRS and Sigma Xi. He is a recipient of the Cledo Brunetti Award of the IEEE, the Baccus Award of SPIE, the Nano 50 Innovator Award, the Robert H. Hill Memorial Award, and a citation from the Electrochemical Society. He received his B.S. in physics from Holy Cross College and his M.S. and Ph.D. in physics from Boston College.

JOHN T. YATES, JR. is Professor of Chemistry and Shannon Fellow in the Department of Chemistry at the University of Virginia. He is a member of the National Academy of Sciences. Dr. Yates developed and used many new physical and chemical measurement methods in surface science to understand structure, dynamics, and chemistry on metals, semiconductors, and insulators. This work has often connected concepts from fundamental research to important technologies governed by surface phenomena. He moved to the University of Virginia in 2006 as a Professor and Shannon Research Fellow and has established a new research program in Surface Science in the Department of Chemistry. He is also becoming active in the new field of astrochemistry. He is active in undergraduate and graduate teaching. In addition, he maintains close relationships with a number of surface science research programs in academic, government, and industrial research laboratories throughout the world, as well as serving on the editorial boards of six journals and two book series in surface science and catalysis. He was Associate Editor of the ACS journal, “Langmuir” and served on the Advisory Board of “Chemical & Engineering News.” He is on the International Advisory Board of “Chemistry World.” He has been active in AVS, APS and ACS affairs for the last 30 years. He is the coeditor of two books, "Vibrational Spectroscopy of Molecules on Surfaces" (Plenum, 1987) and "Chemical Perspectives of Microelectronic Materials" (Materials Research Society, 1989), and is the coauthor of a book entitled “The Surface Scientists Guide to Organometallic Chemistry” (ACS, 1987). The book, “Experimental Innovations in Surface Science,” was published by Springer-Verlag and The American Institute of Physics in 1998. A new textbook “Molecular Physical Chemistry for Engineers,” University Science Books, was published in 2007. Professor John T. Yates, Jr. received his B.S. degree from Juniata College and his Ph.D. in physical chemistry from MIT.